单晶硅纳米磨削力热行为与亚表面损伤研究*
吴珍珍, 乔书杰, 韩涛, 王浩昌, 张飘飘, 闫海鹏
Study on force-thermal behavior and subsurface damage for nano-grinding of single crystal silicon
WU Zhenzhen, QIAO Shujie, HAN Tao, WANG Haochang, ZHANG Piaopiao, YAN Haipeng
现代制造工程
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2024, (5): 80
-85
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DOI: 10.16731/j.cnki.1671-3133.2024.05.011