双面研磨蓝宝石衬底面形及表面粗糙度变化过程的实验研究
邵铭剑, 胡中伟, 张志斌, 谢斌晖
Experimental research on the changing process of sapphire substrate surface shape and surface roughness in double-sided lapping
Shao Mingjian, Hu Zhongwei, Zhang Zhibin, Xie Binhui
现代制造工程
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2017, (9): 8
-12
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DOI: 10.16731/j.cnki.1671-3133.2017.09.002