Study on force-thermal behavior and subsurface damage for nano-grinding of single crystal silicon

WU Zhenzhen, QIAO Shujie, HAN Tao, WANG Haochang, ZHANG Piaopiao, YAN Haipeng

Modern Manufacturing Engineering . 2024, (5): 80 -85 . DOI: 10.16731/j.cnki.1671-3133.2024.05.011