Experimental research on the changing process of sapphire substrate surface shape and surface roughness in double-sided lapping
Shao Mingjian, Hu Zhongwei, Zhang Zhibin, Xie Binhui
Modern Manufacturing Engineering . 2017, (9): 8 -12 .  DOI: 10.16731/j.cnki.1671-3133.2017.09.002

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