Abstract: Dielectric elastomer is a smart material which has great deformation performance,by using its special performance,a dielectric elastomer valveless micropump with double chambers and three simple harmonic oscillators was prepared.Using the three-dimensional simulation of FLUENT software,the charts of pressure,density,velocity vector and velocity path line were acquired.The conclusions are as follows from the comparison charts:the fluid with high velocity will generate more pressure to micropump,the density of fluid in micropump has no direct connection to fluid velocity,the velocity is higher in passageway where cross sectional area is smaller,and the velocity has little influence on path line.

Key words: dielectric elastomer, micropump, FLUENT software, simulation