关键词: 磁控溅射, 铬掺杂碳涂层, 滚动轴承, 性能

Abstract: Cr doped C coatings with different process parameters were prepared on the contact surface of the rolling bearing parts by the closed field unbalanced magnetron sputtering technique.And the performances of the coating bearing,such as speed,vibration,temperature rise,self lubrication and oil-off,were tested.And the effect of different processing parameters on the performance of the coating bearing was compared and analyzed.The results show that,the coating is not suitable for low speed operation of the bearing,the medium-low speed running of the bearing should be chosen for the composite coating of a large carbon element content,and the medium-high speed running of the bearing should be chosen for the composite coating of the large content of chromium element.And that the coating,increased content of chromium element,can improve the temperature rise,the temperature resistance and self lubrication of the composite coating bearing.And the coating bearing has good oil-off performance.

Key words: magnetron sputtering, Cr doped C coating, rolling bearing, performance